The KOFLOC Model 3200 Series High-Grade Mass Flow Controller (Detailed Configuration Code: 3200-V/D0W-H2-20/40SLM) is 100% engineered, assembled, and calibrated in Japan by KOFLOC Corp. (Kojima Instruments Inc.) – an internationally recognized technological benchmark with more than 75 years of specialized innovation in micro-flow fluidics and analytical control instrumentation. Designed as the high-performance successor to the renowned Model 3910 Series, the Model 3200 establishes a premier standard for high-accuracy, high-speed automated gas flow regulation across demanding semiconductor, photovoltaic, and advanced hydrogen clean-energy industries.

The defining electro-mechanical innovation of the KOFLOC Model 3200 is its high-reliability diaphragm-seat proportional control valve (normally closed configuration for failsafe operation). In contrast to conventional sliding piston or needle mechanisms that introduce substantial internal cavity volume and particle shedding, the diaphragm-seat valve dramatically reduces internal dead volume, completely eliminates particle entrapment, and facilitates rapid gas replacement and purge cycles. The flow sensing element utilizes KOFLOC’s proprietary temperature-tracking current difference detection architecture, directly measuring the true mass displacement of traveling gas molecules without internal moving parts. Driven by a high-speed closed-loop digital servo circuit, the controller achieves an ultra-fast dynamic settling time of ≤ 1.0 second, while maintaining laboratory-grade accuracy of ±1.0% F.S. and exceptional repeatability of ±0.2% F.S. across a 2% to 100% control range.

This specific unit is factory calibrated using actual Hydrogen gas (H2) at KOFLOC's Kyoto facility across a high-capacity measuring span of 20 SLM (N2 equivalent) / up to 40 SLM for Hydrogen. Constructed with ultra-clean SUS316L stainless-steel wetted surfaces, a high-fatigue Ni-Co alloy diaphragm, and PTFE/Viton seals, the instrument withstands operating pressures up to 300 kPa (G) and proof pressures up to 980 kPa (approx. 10 bar / 145 psi), with an ultra-high vacuum leak rate of ≤ 1 × 10^-8 Pa·m³/s He. Equipped with standard SEMI compliant D-sub 9-pin electrical connections delivering 0 to 5 VDC command/feedback telemetry and 1/4" double-ferrule compression fittings, the KOFLOC 3200 is an indispensable fluid control asset for hydrogen fuel cell test benches, semiconductor CVD/ALD reactors, metallurgical sintering furnaces, and certified gas research facilities worldwide.

• Manufacturer: KOFLOC Corp. (Kojima Instruments Inc.)
• Origin: 100% Japan (Kyoto, Japan)
• Product Series: High-Grade Diaphragm-Seat Thermal Mass Flow Controller (MFC)
• Complete Model Code: 3200-V/D0W-H2-20/40SLM
• Base Series: Model 3200 Series (advanced successor to the Model 3910 Series)
• Sensing Principle: Proprietary temperature-tracking current difference detection thermal flow sensor (no moving parts)
• Valve Architecture: Fast-acting proportional solenoid diaphragm-seat valve with minimized dead volume (Normally-Closed configuration)
• Calibrated Process Fluid: Hydrogen gas (H2 - factory calibrated using actual gas)
• Rated Full-Scale Flow Capacity: 20 SLM (N2 equivalent) / up to 40 SLM (for Hydrogen gas H2) [Standard Liters per Minute]
• Standard Reference Temperature: 20 °C at 1 atm (101.325 kPa)
• Flow Control Accuracy: Within ±1.0% F.S. (at 20 °C / 25 °C)
• Measurement Repeatability: Within ±0.2% F.S.
• Flow Control Dynamic Range: 2% to 100% of Full Scale
• Settling / Response Time: Ultra-fast, ≤ 1.0 second (to settle within ±2% of setpoint from 0 to 100%)
• Operating Differential Pressure: 50 kPa to 300 kPa (G)
• Allowable Operating Pressure: 300 kPa (G) or less
• Proof Pressure Resistance: 980 kPa (G) (approx. 1.0 MPa / 145 psi)
• Helium Leak Integrity: ≤ 1 × 10^-8 Pa·m³/s He
• Command Input Signal (Flow Setpoint): 0 to 5 VDC (Input impedance ≥ 1 MΩ; valve fully closed at setting input of ≤ 2% F.S.)
• Output Feedback Signal: 0 to 5 VDC linear voltage (Recommended external load resistance ≥ 250 kΩ)
• Electrical Interface: D-sub 9-pin Male connector (KFC standard, fully compliant with SEMI standards)
• Process Fitting Connections ("W"): 1/4" SWL (Double-Ferrule Lok Compression Tube Fittings)
• Wetted Materials:
  - Body & Internal Flow Passage: Ultra-clean SUS316L Stainless Steel
  - Valve Diaphragm: High-durability Nickel-Cobalt alloy (Ni-Co Alloy)
  - Valve Seat: Fluorocarbon resin (PTFE)
  - Sealing O-rings: Fluoroelastomer FKM (Viton)
• Operating Ambient Temperature: 0 °C to 50 °C (Accuracy guaranteed within 15 °C to 35 °C)
• Operating Ambient Humidity: 10% to 90% RH (No condensation allowed)
• Power Supply Requirements: Dual supply +15 VDC (±5%) 100 mA, -15 VDC (±5%) 200 mA
• Net Weight: Approx. 1,000 g (Heavy-duty EMI-shielded metal construction)
• Certifications: CE marked, RoHS directive compliant, factory pre-calibrated with traceable test inspection sheet
• Applicable Industries & Systems: Hydrogen fuel cell testing and balance-of-plant (BOP) systems, semiconductor and photovoltaic wafer processing (CVD / ALD / MOCVD), metal sintering and hydrogen furnace atmospheres, industrial gas chromatography, clean energy research suites, and automated high-purity gas blending panels.